Risk Assessment of Horizontal Wet Etching Equipment System in Manufacturing Plant Industry

Authors

  • Nor'ain Mohd Ramli Department of Chemical and Environmental Engineering, Faculty of Engineering, Universiti Putra Malaysia, 43400 UPM Serdang, Selangor Darul Ehsan.
  • Siti Aslina Hussain Safety Engineering Interest Group (SEIG), Department of Chemical and Environmental Engineering, Faculty of Engineering, Universiti Putra Malaysia, 43400 UPM Serdang, Selangor, Malaysia http://orcid.org/0000-0001-8475-9791

DOI:

https://doi.org/10.11113/jest.v3n1.58

Keywords:

Maintenance, Reliability, Horizontal Wet Etching Process, Key Performance, Failure Mode and Effect Analysis.

Abstract

Maintenance is one of the important roles in the high technology manufacturing industry. It is related to the key performance factors of the company such as quality, productivity, and cost. To achieve these factors, a reliability plan should be implemented which helps to maximise production value by implementing successful asset maintenance. This research project aims to focus on the critical process equipment known as Horizontal Wet Etching Equipment (HWEE) used in the wet etching process. The components in the HWEE system were identified by referring to the process and instrumentation diagram (P&ID) of the equipment and were categorised in different modes. Data on mean time to repair (MTTR) and mean time between repairs (MTBF) were collected based on previous company records. The data were analysed using MAROS software. Failure Mode and Effect Analysis (FMEA) was done to understand the risk of each of the components. The result shows that piping and gearbox have the highest RPN with 126 and 105, respectively. This study helps to identify critical components and is able to help the company to improve equipment reliability and reduce maintenance cost. Corrective action can be implemented to reduce the RPN for both components. Thus, it would help the industry to increase the key performance and become more competitive in the business environment.

References

Akarslan, F. 2011. ‘Photovoltaic Systems and Applications, Modelling and Optimization of Renewable Energy Systems’. Intech, Croatia.

Alizadeh, S. & Sriramula, S. 2018. Impact of Common Cause Failure on Reliability Performance of Redundant Safety Related Systems Subject to Process Demand. Reliability Engineering and System Safety. 172 (December 2017): 129–150.

Hacke, P., Lokanath, S., Williams, P., Vasan, A., Sochor, P., Tamizhmani, G. & Kurtz, S. 2018. A Status Review of Photovoltaic Power Conversion Equipment Reliability, Safety, And Quality Assurance Protocols. Renewable and Sustainable Energy Reviews. 82 (July 2017): 1097–1112.

Jiang, Z., Zhou, T., Zhang, H., Wang, Y., & Cao, H. 2016. Reliability and Cost Optimization for Remanufacturing Process Planning. Journal of Cleaner Production. 135: 1602–1610.

Kenneth B. 2016. ‘Equipment Reliability Principles. Rethinking Bhopal, A Definitive Guide to Investigating, Preventing, and Learning from Industrial Disasters’. 21-63. Elsevier, Oxford, United Kingdom.

Mauro V., Vittorio C., Lucrezia A. & Vito I. 2017. Optimization of Photovoltaic Maintenance Plan by Means of a FMEA Approach Based on Real Data. Journal of Energy Conversion and Management. 152: 1-12.

Moinuddin, K. A. M., & Thomas, I. R. 2014. Reliability of Sprinkler System in Australian High Rise Office Buildings. Fire Safety Journal. 63: 52–68.

Nor’ain M. R. 2018. ‘Failure Mechanism on Horizontal Wet Etching Equipment in High Technology Manufacturing Plant Industry’. Master in Science Thesis. Universiti Putra Malaysia.

Peng, D., Duh, Y. & Shu, C. 2006. Wet Bench Reactive Hazards of Cleaning Stages in Semiconductor Manufacturing Processes. Journal of Loss Prevention in the Process Industrie. 19: 743–753.

Sze, S.M. & Ng, K.K 2006. ‘Physics of Semiconductor Devices (3rd Edition)’. Wiley, London.

Vishnu, C. R. & Regikumar, V. 2016. Reliability Based Maintenance Strategy Selection in Process Plants : A Case Study. Procedia Technology. 25: 1080–1087.

Yasaad, B., Khiat, M. & Chaker, A. 2014. Electrical Power and Energy Systems Reliability Centered Maintenance Optimization For Power Distribution Systems. International Journal of Electrical Power and Energy Systems. 55: 108–115.

Karaven Ali, & Vasili, Mohamamreza & Maji, 2018. Improving Maintenance Strategies by Increasing Equipment Reliability at the Design Phase.

Maintainability, Availability, Reliability and Operability Simulation program (MAROS), 2016, Version no 9.03.01.1043, DNV-GL, Norway.

Downloads

Published

2020-11-03

How to Cite

Mohd Ramli, N., & Hussain, S. A. (2020). Risk Assessment of Horizontal Wet Etching Equipment System in Manufacturing Plant Industry. Journal of Energy and Safety Technology (JEST), 3(1). https://doi.org/10.11113/jest.v3n1.58

Issue

Section

Articles